Development of Technology for Sensor Chip Production with Increased Sensitivity and Improved Physical and Mechanical Characteristics for Optical Sensors Based on Surface Plasmon Resonance

V.A. Danko; I.Z. Indutnyi; Yu.V. Ushenin; P.M. Lytvyn; V.I. Minko; P.E. Shepeliavyi; M.V. Lykanyuk; A.A. Korchovyi; R.V. Khristosenko

doi:10.15407/scine13.06.025

Development of Technology for Sensor Chip Production with Increased Sensitivity and Improved Physical and Mechanical Characteristics for Optical Sensors Based on Surface Plasmon Resonance

Authors

V.A. Danko Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
I.Z. Indutnyi Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
Yu.V. Ushenin Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
P.M. Lytvyn Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
V.I. Minko Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
P.E. Shepeliavyi Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
M.V. Lykanyuk Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
A.A. Korchovyi Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine
R.V. Khristosenko Lashkariov Institute of Semiconductor Physics, the NAS of Ukraine

DOI:

https://doi.org/10.15407/scine13.06.025

Keywords:

biosensors, interference lithography, surface plasmon resonance, vacuum chalcogenide photoresists

Abstract

An innovative project on the development of a method for manufacturing sensor chips with increased sensitivity for biosensors based on surface plasmon resonance (SPR) operating in the Kretschmann scheme has been completed. An increase in sensitivity of such sensor has been achieved by high-frequency periodic grate on the sensor chip surface formed by interference photolithography. All technology processes have been optimized. A pilot sample of modernized SPR refractometer as well as a pilot batch of nanostructured sensor chips with spatial frequencies up to 3400 mm-1 have been manufactured and tested. The use of nanostructured chips resulted in a 4.7-time increase in the SPR refractometer sensitivity.

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Published

2024-08-28

How to Cite

Danko, V., Indutnyi, I., Ushenin, Y., Lytvyn, P., Minko, V., Shepeliavyi, P., Lykanyuk, M., Korchovyi, A., & Khristosenko, R. (2024). Development of Technology for Sensor Chip Production with Increased Sensitivity and Improved Physical and Mechanical Characteristics for Optical Sensors Based on Surface Plasmon Resonance. Science and Innovation, 13(6), 25–33. https://doi.org/10.15407/scine13.06.025

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Issue

Vol. 13 No. 6 (2017): Science and Innovation

Section

Research and Engineering Innovative Projects of the National Academy of Sciences of Ukraine

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