Device for Producing Coatings by Means of Atomic-Ion Sputtering Method
DOI:
https://doi.org/10.15407/scin8.03.005Keywords:
vacuum chamber, electron gun, atomic-ion sputtering, RF ionization, protective coatings.Abstract
Experimental equipment for application of erosion and cor rosion protective coatings on the blades of steam turbines of thermal and nuclear power plants was designed. Protective coatings are applied by atomic-ion sputtering with the RFionization of the vapor phase. Investigations of coating properties including nuclear-physical methods were carried out.
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