Scanning Helium Ion Microscope
DOI:
https://doi.org/10.15407/scin8.02.023Keywords:
helium ion microscope, single atom source, high resolution.Abstract
This article describes the experience of using helium microscope ORION (Carl Zeiss) at the Interdisciplinary Resource Center of «Nanotechnology» (St.Petersburg, Russia). Author discusses the formation and stability of helium single atom source, the processes of interaction of helium ions with the investigated substance, describes the possibility of applying helium ion microscopy and lithography.
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