Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
DOI:
https://doi.org/10.15407/scin8.02.017Keywords:
proton beam writing, scanning nuclear microprobe, nanofabrication.Abstract
The application of focusing beams of protons with MeV energy in fabrication technology of micro- and nano-dimension structures is considered. Difference features of energetic protons interaction with resistive materials are shown. The representation about state of the art of technology of proton beam lithography is given and prospects of its development are formulated.
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