Field Type Ion Injector
DOI:
https://doi.org/10.15407/scin6.05.072Keywords:
brightness, emission, focused ion beam, gas field ion sourceAbstract
To improve the spatial resolution of FIB systems, field type ion injector has been developed. Measurements of the injector parameters are performed on the high-vacuum stand with a residual pressure about 5 ⋅ 10-7 Pa. Ion injector consists of a needle-in-capillary type gas field ion source, focusing einzel lens and compact Wien filter with permanent magnets. The field ion source design provides the possibility of cooling the tungsten needle to a liquid nitrogen temperature. Currentvoltage characteristics of the ion source operating at room temperature have been measured. Ion field emission current up to (1-5)•10-12 A at 2-5 kV emission voltage is obtained.
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