High-brightness RF Ion Sources for Accelerator Applications
DOI:
https://doi.org/10.15407/scin6.05.038Keywords:
brightness, focused ion beam, helicon ion source, multicuspion sourceAbstract
The results of investigations of two types of radio-frequency ion sources: helicon and multicusp versions with compact magnet systems are presented. The following paramenters of the sources were obtained: plasma density of 1011–9×1012 cm-3, beam current densities of 10-130 mA/cm2, brightness 100 A•m-2•rad-2•eV-1, energy spread 8-30 eV, RF power input into the plasma of 40-400 W and pressure of 2-10 mTorr.
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